The 81st JSAP Autumn Meeting, 2020

Presentation information

Print

Oral presentation

CS Code-sharing session » 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[10a-Z24-1~12] 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

Thu. Sep 10, 2020 8:45 AM - 12:00 PM Z24

Hironori Fujisawa(Univ. of Hyogo), Shosuke Fujii(Kioxia)

9:45 AM - 10:00 AM

△ [10a-Z24-5] Preparation of HfO2-based ferroelectric thick films at room temperature by the sputtering method and their electrical and piezoelectric properties

〇(PC)Reijiro Shimura1, Takanori Mimura1, Akinori Tateyama1, Takao Shimizu1, Hiroshi Funakubo1 (1.Tokyo Tech. SMCT)

Keywords:ferroelectric film, HfO2, piezoelectric film