[10a-Z27-1~10] 11.4 Analog applications and their related technologies

[10a-Z27-5] Fabrication of 2 THz wave-guide type Hot electron bolometer mixer (1)

〇Akira Kawakami¹, Yoshihisa Irimajiri¹, Ming-Jye Wang², Wei-Chun Lu², Yuji Hishida¹, Hirotaka Terai¹ (1.NICT, 2.ASIAA(Taiwan))

Keywords:superconducting, waveguide, hot electron bolometer mixer

The superconducting hot electron bolometer mixer (HEBM) is a mixer element that is expected to operate above 2 THz. We have proposed a new HEBM structure (Ni-HEBM) using Ni magnetic material, and the quasi-optical Ni-HEBM has achieved low noise temperature operation and wide IF bandwidth. At present, the development of a waveguide HEBM with a better beam pattern is desired, and we study a 2 THz waveguide Ni-HEBM by using Si₃N₄ membrane structure. Fabrication methods of NbN ultra-thin film and membrane structure will be described.