[10a-Z29-1~14] 17.3 Layered materials

[10a-Z29-8] Tailor-made two dimensional nano scale supper structure

〇(M1)Nanami Ichinose¹, Satoshi Iida¹, Liu Zheng², Kitaura Ryo¹ (1.Nagoya Univ., 2.AIST)

Keywords:transition metal dichalcogenide, lateral supper structure

Two-dimensional heterostructures have attracted research interest to aim for new physical properties. In this work, we paid attention to lateral supper structure in which two-dimensional materials are joined in multiple stages. We used transition metal dichalcogenides as components and fabricated WS₂/MoS₂ lateral supper structure by metal organic chemical vapor deposition. This time we will report ~3 nm junction length of WS₂/MoS₂.