5:30 PM - 5:45 PM
[10p-Z08-16] Development of highly sensitive and low noise TMR magnetic sensor for bio-magnetic field measurement
Keywords:magnetic sensor, bio magnetic field, magnetocardiography
We have developed TMR sensor with magnetic resolution of 7 pT/√Hz @ 1 Hz. In the magnetocardiography measurement, an R peak due to the heartbeat was observed, and a clear QRS peaks was observed by averaging. We also succeeded in reducing the magnetic noise to about half by using the free layer that was magneto-statically coupled. Furthermore, we succeeded in dramatically reducing environmental noise by preparing a gradiometer with a sensor close to the signal source and a sensor far from the signal, and demonstrated the feasibility of a highly sensitive magnetic sensor that does not require a magnetic shielded room.