The 81st JSAP Autumn Meeting, 2020

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-Z09-1~20] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Thu. Sep 10, 2020 12:30 PM - 6:00 PM Z09

Koichiro Saga(Sony), Nobuya Mori(Osaka Univ.), Takashi Hasunuma(Univ. of Tsukuba)

1:00 PM - 1:15 PM

[10p-Z09-3] Corrosion behavior of molybdenum in acid solutions

〇Saki Akimoto1, Masaaki Hirakawa2 (1.Shibaura mechatronics, 2.Toshiba Corporate Manufacturing Engineering Center)

Keywords:wet etching, semiconductor, phosphoric acid