The 81st JSAP Autumn Meeting, 2020

Presentation information

Symposium (Oral)

Symposium » Leading edge of phonon engineering

[10p-Z13-1~8] Leading edge of phonon engineering

Thu. Sep 10, 2020 1:00 PM - 4:50 PM Z13

Toshio Baba(JST), Takashi Yagi(AIST)

2:30 PM - 3:00 PM

[10p-Z13-4] Thermophysical Properties of Functional Thin Films

Yuzo Shigesato1, Nobuto Oka2, Junjun Jia3, Makoto Kashiwagi1, Yuichiro Yamashita4, Takashi Yagi4, Naoyuki Taketoshi4 (1.Aoyama Gakuin Univ., 2.Kindai Univ., 3.Waseda Univ., 4.AIST)

Keywords:functional thin films, Thermophysical properties, nano-picosecond thermoreflectance technique

Thermophysical properties of the various functional thin films including metals, oxide semiconductors, highly degenerated wide-bandgap semiconductors, i.e. transparent conductive oxides, various nitride thin films, have been analyzed by nano-picosecond thermoreflectance technique. The relationships between thermal conductivity and electrical conductivity were analyzed in terms of the Wiedemann-Franz law to clarify the heat transfer carried by free electrons. The heat transfer carried by phonon was also discussed in correlation with the various properties, such as crystallinity, polycrystalline structures, Young’s modulus.