[10p-Z15-1~10] Recent progress in Advanced Ion Microscopy: Application to nano materials / devices and life science

▲ [10p-Z15-1] Nanostructuring for heat flux management in semiconductor thin films

〇Masahiro Nomura¹ (1.Univ. of Tokyo)

Keywords:phonon engineering, nanoscale, heat transfer

Heat conduction control using nanostructures attracts much attention since the 1990s due to its high potential for advanced thermal management using the ballistic property and band engineering based on the wave nature of phonons. In this talk, we introduce two interesting heat conduction control techniques using phononic structures with nanoholes in Si thin films and discuss the new possibility of heat conduction control in thin films by nanostructuring.