[10p-Z22-6~18] 1.6 Ultrasonics

[10p-Z22-8] Relationship between thickness ratio and temperature characteristics of double layered thickness-shear resonator

〇Yusuke Owada¹, Yuji Ohashi², Masaya Omote³, Yuui Yokota¹, Shunsuke Kurosawa², Kei Kamada², Hiroki Sato², Satoshi Toyoda², Akihiro Yamaji², Masao Yoshino¹, Takashi Hanada¹, Akira Yoshikawa^1,2 (1.IMR Tohoku Univ., 2.NICHe Tohoku Univ., 3.XMAT)

Keywords:Thickness-shear mode resonator, Langasite-type piezoelectric single crystal, Temperature compensation

To improve the temperature characteristics of Lanagsite-type piezoelectric single crystals, a double layered thickness-shear mode resonator was developed. The double layered resonator has different resonance frequency temperature characteristics depending on the order of each resonance mode. Since this phenomenon does not occur in a normal single substrate resonator, we investigated this mechanism. As a result, it was clarified that this phenomenon occurs in resonators with different thickness ratios between substrates.