09:00 〜 09:15
▼ [11a-Z03-3] Determination of arbitrary EEDF of atmospheric-pressure plasma by OES continuum emission spectrum analysis
キーワード：Atmospheric-pressure non-equilibrium plasma, Optical emission spectroscopy, Electron diagnostics
New and emerging fields that use atmospheric-pressure non-equilibrium plasma require accessible and easy-to-use diagnostics tools. In this work a new method is presented that is capable of determining arbitrary EEDF from OES measurement. For this, the continuum spectrum is used, which is mostly dominated by neutral bremsstrahlung. The neutral bremsstrahlung emission can be related to the EEDF through an integral equation, from which the EEDF can be obtained by machine learning. This machine learning scheme has been improving steadily and is currently capable of determining detailed EEDF from a realistic OES measurement range with a calculation time in the order of several minutes only. The method presented can potentially become a convenient way of determining arbitrary EEDF in atmospheric-pressure plasma.