[11a-Z05-1~7] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[11a-Z05-3] Effect of the Gas Pressure on the Loss in a Plasma Variable Capacitor

〇Shu Nishioka¹, Shingo Yamaura¹, Teruki Naito¹, Kengo Nishimoto¹, Yasuhiro Nishioka¹ (1.Mitsubishi Electric)

Keywords:Plasma, Circuit Element, Variable Capacitor

Recently, a capacitor that uses the plasma as a variable dielectric i.e., a plasma variable capacitor has been suggested. This variable capacitor is a good candidate for fast tuning with high power-handling capability. The experimental results, however, have shown its small value of the Quality factor. The purpose of the resent reports is to clarify the effect of the gas pressure on the loss in a plasma variable capacitor. The experimental results have shown that the loss of the capacitor has been improved due to the decrease in the gas pressure.