9:15 AM - 9:30 AM
[11a-Z09-4] Improvement of Ge MOS interfacial quality through HI plasma treatment
Keywords:Ge, HI, MOSCAPs
Presentation information
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies
[11a-Z09-1~12] 13.5 Semiconductor devices/ Interconnect/ Integration technologies
Fri. Sep 11, 2020 8:30 AM - 11:45 AM Z09
Kensuke Ota(Kioxia), Osamu Nakatsuka(Nagoya Univ.)