The 81st JSAP Autumn Meeting, 2020

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[11a-Z10-1~10] 13.3 Insulator technology

Fri. Sep 11, 2020 8:30 AM - 11:15 AM Z10

Yuuichiro Mitani(Tokyo City University)

8:45 AM - 9:00 AM

[11a-Z10-2] Inspection and evaluation of chemical solution oxidation methods for metal / Si structures

〇Kazuki Harada1, Keita Shimura1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Tokyo Univ. of Agri. & Tech.)

Keywords:semiconductor, MOS-FET