Growth and evaluation of N-polar AlN and AlGaN / AlN hetero-structures

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

Fri. Sep 11, 2020 1:00 PM - 6:15 PM Z02

Tsutomu Araki(Ritsumeikan Univ.), Shugo Nitta(Nagoya Univ.), Tomoyuki Tanikawa(Osaka Univ.)

5:15 PM - 5:30 PM

〇Tadatoshi Ito¹, Kazuya Ataka¹, Ryota Sakamoto¹, Yongzhao Yao², Yukari Ishikawa², Narihito Okada¹, Kazuyuki Tadatomo¹ (1.Yamaguchi Univ., 2.JFCC)

Keywords:MOVPE, N-polar AlN, HEMT