The 81st JSAP Autumn Meeting, 2020

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[11p-Z02-1~19] 15.4 III-V-group nitride crystals

Fri. Sep 11, 2020 1:00 PM - 6:15 PM Z02

Tsutomu Araki(Ritsumeikan Univ.), Shugo Nitta(Nagoya Univ.), Tomoyuki Tanikawa(Osaka Univ.)

2:00 PM - 2:15 PM

[11p-Z02-5] Fabrication of GaN Thin Films by RF Magnetron Sputtering and The Pressure Dependence of Electrical Resistance

〇(M2)Yuki Saito1, Takuya Miyamoto1, Yuuki Sato1, Tadashi Ohachi1, Shinzo Yoshikado1, Kikuro Takemoto2, Hiroyuki Uno2, Naoto Kimura2, Masanori Takasaki2 (1.Doshisha Univ., 2.Yamanaka Hutech Corp.)

Keywords:GaN, Sputtering