The 81st JSAP Autumn Meeting, 2020

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13 Semiconductors » 13.7 Compound and power electron devices and process technology

[11p-Z04-1~14] 13.7 Compound and power electron devices and process technology

Fri. Sep 11, 2020 1:00 PM - 4:45 PM Z04

Masashi Kato(Nagoya Inst. of Tech.)

3:45 PM - 4:00 PM

[11p-Z04-11] Evaluation of Epitaxial Wafers for Transfer Substrate DHBTs

〇Takuya Hoshi1, Yuta Shiratori1, Hiroki Sugiyama1, Hideaki Matsuzaki1 (1.NTT Device Technology Labs.)

Keywords:DHBT, Transfer Substrate, Epitaxial Growth