The 81st JSAP Autumn Meeting, 2020

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15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[11p-Z12-1~17] 15.7 Crystal characterization, impurities and crystal defects

Fri. Sep 11, 2020 12:30 PM - 5:15 PM Z12

Kazuhisa Torigoe(SUMCO), Susumu Maeda(GWJ), Takuo Sasaki(QST), Haruo Sudo(GlobalWafers)

3:00 PM - 3:15 PM

△ [11p-Z12-10] Effect of nitrogen doping on intrinsic point defect behavior in growing CZ-Si crystal

〇Motoharu Taniguchi1, Koji Sueoka2, Masataka Hourai3 (1.M.S.Okyayama Pref. Univ., 2.Okayama Pref. Univ., 3.SUMCO)

Keywords:intrinsic point defect, nitrogen, first principles analysis