[11p-Z12-1~17] 15.7 結晶評価，不純物・結晶欠陥

▼ [11p-Z12-6] Structural Analysis of Na-flux GaN by Nanobeam X-ray Diffraction:
Local Lattice Constant Variation Depending on the Growth Mode

〇(M2)Zhendong WU¹、Kazuki Shida¹、Takeaki Hamachi¹、Yusuke Hayashi¹、Tetsuya Tohei¹、Masayuki Imanishi²、Yusuke Mori²、Kazushi Sumitani³、Yasuhiko Imai³、Shigeru Kimura³、Akira Sakai¹ (1.Grad. Sch. Eng. Sci., Osaka Univ.、2.Grad. Sch. Eng., Osaka Univ.、3.JASRI)

キーワード：GaN, nanoXRD, Na-flux growth method