The 81st JSAP Autumn Meeting, 2020

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15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[11p-Z12-1~17] 15.7 Crystal characterization, impurities and crystal defects

Fri. Sep 11, 2020 12:30 PM - 5:15 PM Z12

Kazuhisa Torigoe(SUMCO), Susumu Maeda(GWJ), Takuo Sasaki(QST), Haruo Sudo(GlobalWafers)

2:30 PM - 2:45 PM

△ [11p-Z12-8] Calculation of interstitial Si clusters in Si crystal using ANN potential

〇(M1)Masato Ohbitsu1, Tatsuya Yokoi2, Yusuke Noda3, Hiroki Nagakura1, Sueoka Koji4 (1.Graduate School of Engineering, Okayama Pref. Univ., 2.Graduate School of Engineering, Nagoya Univ., 3.Kanazawa Gakuin Univ., 4.Okayama Pref. Univ.)

Keywords:interstitial Si, ANN, DFT