[8a-Z05-1~11] 6.2 Carbon-based thin films

[8a-Z05-11] Orientation and C-N Sheet Structure of Layered Carbon Nitride Films

〇Hitoe Habuchi¹, Tamio Iida¹ (1.Natl. Inst. Technol., Gifu Coll.)

Keywords:carbon nitride, layered structure, X-ray diffraction

We clarify the orientation and C-N sheet structure of carbon nitride films prepared by CVD from a melamine source. The diffraction pattern from a θ/2θ scan shows two peaks at 27.77 and 57.3°, corresponding respectively to the (001) and (002) orientations. The pole figure of (001) indicates that the carbon–nitrogen layer in the film is stacked parallel to the substrate. We use an in-plane scan to successfully measure the pattern of (hk0) diffractions excluding (00l) and (hkl) diffractions.