[8a-Z09-1~10] 22.1 Joint Session M "Phonon Engineering"

△ [8a-Z09-9] Heat Transfer Measurement between Nanogap with Single Crystal Silicon (111) Cleavage Plane

〇(D)Masaki Shimofuri¹, Yoshikazu Hirai¹, Toshiyuki Tsuchiya¹ (1.Kyoto Univ.)

Keywords:near-field radiative transfer, nanogap, thermionic generation

A nanogap, which is expected to be applied to a thermoelectron power generation element with small temperature difference operation, was fabricated by cleaving single crystal silicon using a MEMS device, and heat transfer measurement was performed while reducing the gap distance by an electrostatic actuator. When the driving force was increased even after the gap contact, a significant increase in heat transfer was observed. Since the contact heat conduction was estimated to be sufficiently small, it is considered that the gap distance dependence of the near-field radiative transfer could be measured.