[8a-Z28-1~5] Development of the engineering for the diverse stable phases ~Objectives for the future environment, energy materials and devices

[8a-Z28-3] Polytype Control in Silicon Carbide Crystal Growth

〇Tomohisa Kato¹ (1.AIST)

Keywords:semiconductor, crystal growth, silicon carbide

For the growth of high quality SiC single crystals for power semiconductors, polytype control technology is important. In this talk, the background of these techniques is introduced and the importance of polytype control is discussed.