[8p-Z06-1~9] The Third-generation dissimilar materials bonding and its application to the film growth control: Interface nano-kubernetes

[8p-Z06-1] Widegap Semiconductor Heterojunction and Device Application

〇Yasuo Yasuo Yasuo¹, Masataka Imura¹, Jianwei Liu¹, Meiyong Liao¹ (1.NIMS)

Keywords:diamond, Heterojunction, III-Nitrides

In this talk, we will focus on the diamond semiconductor heterojunctions and the device applications which we have been promoting applications of diamond expected as next-generation power semiconductor materials in place of SiC and GaN. Specifically, we will summarize AlN/diamond heterojunction transistors grown by metalorganic vapor phase epitaxy or sputtering technique together with a recent BN/diamond heterojunction application.