[8p-Z12-1~12] 12.7 Biomedical Engineering and Biochips

△ [8p-Z12-3] Fabrication of Potassium Ion Image Sensor Using Sol-gel Glass Sensitive Film Compatible with CMOS Process

〇Kotaro Sakamoto¹, Toshiki Sugimoto¹, Tomoko Horio¹, Kazuhiro Takahashi¹, Toshihiko Noda¹, Kazuaki Sawada¹ (1.Toyohashi Univ.)

Keywords:Ion Image Sensor, Potassium Ion, Sol-Gel

The brain is controlled by the ions released by cells, and the technique of visualizing these is important for clarifying the brain function. In our laboratory, we have developed a K⁺ image sensor using PVC membrane to observe extracellular K⁺ concentration distribution. However, since the PVC film has low biocompatibility, a K⁺ sensitive film using sol-gel glass, which is a biocompatible material, has attracted attention. In this study, we examined the film formation conditions for the miniaturization of the sensor, fabricated a K⁺ image sensor, and verified the CMOS process compatibility of the K⁺ sensitive film.