[9a-Z06-1~11] 6.6 Probe Microscopy

△ [9a-Z06-2] Evaluation of displacement and surface potential of a micro-piezoresistive sensor using a Kelvin probe force microscope

〇Kenta Nakazawa¹, Takumi Tanaka¹, Takeshi Uruma¹, Futoshi Iwata¹ (1.Shizuoka Univ.)

Keywords:Kelvin probe force microscope, MEMS, In-situ measurement

Microelectromechanical Systems (MEMS) is significant technology for sensors and actuators in mobile devices. In sensors, the evaluation of conversion element from mechanical signals to electrical signals such as a piezoresistive sensor is required because the features of sensor such as resolution are influenced by the characteristics of the element. However, the measurement method to evaluate the mechanical and electrical characteristics of MEMS in microscale is still problem. In this study, we propose the measurement method to evaluate the mechanical and electrical characteristics of piezoresistive sensors using a scanning probe microscope.