[9a-Z17-1~4] 6.5 Surface Physics, Vacuum

[9a-Z17-3] First-Principles Analysis of Diamond Surface Etching via Graphitization and Delamination at Metal-Diamond Interface

〇Kohji Inagaki¹, John Isaac Enriquez¹, Yoshitada Morikawa¹, Masaaki Geshi³, Masato Michiuchi² (1.Osaka Univ., 2.Sumitomo Electric Industries, 3.Osaka Univ. Nano)

Keywords:diamond, grphitization, etching

The diamond (111) surface is well known to be graphitized around the step, but cannot be easily peeled off due to the strong carbon-carbon bond with the base. In this study, first-principles calculations are conducted to show that at the diamond-metal interface, the bond between the generated surface graphite and the substrate is relatively easily cleaved by the catalytic action of metal atoms. We show that graphite can cause etching by desorbing from the diamond surface.