The 81st JSAP Autumn Meeting, 2020

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3 Optics and Photonics » 3.7 Laser processing

[9a-Z18-1~10] 3.7 Laser processing

Wed. Sep 9, 2020 9:15 AM - 12:00 PM Z18

Daisuke Nakamura(Kyushu Univ.), Mizue Mizoshiri(Nagaoka Univ. of Tech.)

10:00 AM - 10:15 AM

[9a-Z18-4] Formation of ohmic electrode without thermal annealing by femtosecond laser irradiation to Ni/SiC interface

〇Yoshio Mizumoto1, Yuusuke Takashima1, Yoshiki Naoi1, Takuro Tomita1 (1.Tokushima Univ.)

Keywords:femtosecond laser, silicon carbide