[9a-Z18-1~10] 3.7 Laser processing

[9a-Z18-7] Effects of repetition rates and pulse durations on ablation rates and quality of the ultrashort-pulse laser drilling

〇Dai Yoshitomi¹, Hideyuki Takada¹, Aiko Narazaki¹, Kenji Torizuka¹, Yohei Kobayashi² (1.AIST, 2.ISSP Univ. Tokyo)

Keywords:ablation, laser, ultrashort pulse

We studied the effects of repetition rates (100 Hz - 1 MHz) and pulse durations (0.4 - 200 ps) in a wide continuous range on the ablation rates and the quality in ultrashort pulse laser drilling. For ultrashort pulses, remarkable discolorization around the craters was observed in certain repetition rates, which revealed to be due to increased oxide debris according to the SEM/EDX measurement. The ablation rates were found to depend on repetition rates as well.