[9a-Z18-1~10] 3.7 Laser processing

[9a-Z18-8] Nonthermal/Thermal Process Boundary in Ultrashort Pulse Laser Processing of Ceramics

〇Hideyuki Takada¹, Aiko Narazaki¹, Dai Yoshitomi¹, Kenji Torizuka¹, Yohei Kobayashi² (1.AIST, 2.ISSP Univ. Tokyo)

Keywords:laser processing, ultrashort pulse, non-thermal processing

In order to realize high speed and high quality in ultrashort pulse laser processing, it is important to clarify the boundary of non-thermal/thermal processing depending on various processing conditions in various materials. In this paper, we report on the boundary between non-thermal and thermal processing for time domain parameters such as pulse width, repetition frequency, etc., for AlN and ZrO2, which are difficult-to-process industrial ceramics and have very different thermal conductivity and are expected to have a large effect on the appearance of non-thermal/thermal processing.