[9a-Z22-1~3] 1.3 新技術・複合新領域

▲ [9a-Z22-2] Towards integrated liquid sensor based on LSPR and SH-SAW devices using 36YX-LiTaO₃ substrate

〇(D)Teguh Firmansyah Talam^1,2、Gunawan Wibisono²、Eko Rahardjo²、Jun Kondoh¹ (1.Shizuoka Univ.、2.Univ. Indonesia)

キーワード：LSPR sensor, SH-SAW sensor, Reflectance

Localized surface plasmon resonance (LSPR) sensor has many advantages at optical side capability. Moreover, shear-horizontal surface acoustic wave (SH-SAW) has excellent performance at electrical properties response with optimum frequency. To combine the LSPR sensor and SH-SAW sensor, we investigated the LSPR sensor using gold nanoparticles (AuNPs) on the 36YX-LiTaO₃ substrate, which usually uses glass as a substrate. The effect of the 36YX-LiTaO₃ substrate for the LSPR sensor was investigated based on reflectance performance. As a result, the LSPR with thin-film generates a low Q factor/broadband spectrum with insignificant shifting. In contrast, the LSPR sensor with good Q factor and high sensitivity/shifting was successfully developed using the 36YX-LiTaO3 substrate without thin-film. In future work, we will develop and investigate the interdigital transducer (IDT) to this structure. Therefore the integrated liquid sensor based on LSPR and SH-SAW will be fully implemented.