[9p-Z02-1~6] Functionality and science of transparent crystals: Ecosystems created by deep ultraviolet emitters

[9p-Z02-1] Preparation of High-quality AlN Templates and Its Application for Deep Ultraviolet Devices

〇Hideto Miyake^1,2, Kanako Shojiki², Shiyu Xiao¹, Kenjiro Uesugi^3,1, Haruhiko Koizumi³, Shigeyuki Kuboya³ (1.Grad. Sch. of RIS. Mie Univ., 2.Grad. Sch. of Eng. Mie Univ., 3.SPORR, Mie Univ.)

Keywords:nitride semiconductor, AlN, annealing

Combination of sputter deposition and high-temperature annealing is a promising technique for preparing AlN templates with a low threading dislocation density.By optimizing the fabricating conditions, a TDD of 4 × 10⁷ cm⁻² was achieved for the crack-free AlN template. The high-quality AlN templates are expected to breed high-performance nitride-based UV-LEDs and electronic devices.