The 81st JSAP Autumn Meeting, 2020

Presentation information

Oral presentation

CS Code-sharing session » 【CS.6】 Code-sharing Session of 6.5 & 7.6

[9p-Z05-1~14] 【CS.6】 Code-sharing Session of 6.5 & 7.6

Wed. Sep 9, 2020 12:30 PM - 4:30 PM Z05

Naoka Nagamura(NIMS), Kei Mitsuhara(Ritsumeikan Univ.), Masaru Takizawa(立命館大)

3:30 PM - 3:45 PM

[9p-Z05-11] High-throughput analysis of the initial oxidation process of GaN using data sets and automated peak fitting

Yoshitomo Harada1, Masatomo Sumiya1, Hiroshi Shinotsuka1, Hiroaki Tosaka1, Shigeyuki Matsunami1, Shigeo Tanuma1, Hideki Yoshikawa1 (1.NIMS)

Keywords:X-ray photoelectron spectroscopy, Bayesian Information Criterion, Dataset

The NIMS-DPFC is developing an automatic processing system for format conversion and visualization of data sets. In this study, the data output in VAMAS format into numerical data and metadata . In this way, a series of several hundred XPS spectra were automatically separated into dataset units. The obtained numerical data sets were then subjected to peak separation without analyst dependence by using an automatic peak analysis program using the Bayesian Information Criterion developed by the DPFC.