[9p-Z05-1~14] 【CS.6】 Code-sharing Session of 6.5 & 7.6

[9p-Z05-11] High-throughput analysis of the initial oxidation process of GaN using data sets and automated peak fitting

〇Yoshitomo Harada¹, Masatomo Sumiya¹, Hiroshi Shinotsuka¹, Hiroaki Tosaka¹, Shigeyuki Matsunami¹, Shigeo Tanuma¹, Hideki Yoshikawa¹ (1.NIMS)

Keywords:X-ray photoelectron spectroscopy, Bayesian Information Criterion, Dataset

The NIMS-DPFC is developing an automatic processing system for format conversion and visualization of data sets. In this study, the data output in VAMAS format into numerical data and metadata . In this way, a series of several hundred XPS spectra were automatically separated into dataset units. The obtained numerical data sets were then subjected to peak separation without analyst dependence by using an automatic peak analysis program using the Bayesian Information Criterion developed by the DPFC.