[9p-Z05-1~14] 【CS.6】 Code-sharing Session of 6.5 & 7.6

△ [9p-Z05-5] Surface structure analysis of microstructure on Si substrate by nano-beam Reflection High-Energy Electron Diffraction

〇(M2)Sohei Nakatsuka¹, Kan Naito¹, Taishi Imaizumi¹, Tadashi Abukawa¹, Toyoaki Eguchi², Azusa N. Hattori³, Hidekazu Tanaka³, Ken Hattori⁴ (1.IMRAM,Tohoku Univ., 2.Dept. of Phys.,Tohoku Univ., 3.ISIR,Osaka Univ., 4.NAIST)

Keywords:RHEED, microstructure, Si

By about 100 times flashes, ~1260℃ electrical resistance heating, the shapes of rectangular ridges on the Si(110) substrate were changed into rounded shapes. We observed the surface of the ridges by the technique combining the scanning electron microscope and nano-beam Reflection High-Energy Electron Diffraction which we have developed to analyze the surface structure of such micro- or nano- areas. Several characteristic diffraction patterns which show the surface of the ridge changed to the structure surrounded by multiple crystalline planes. In addition, in order to obtain dark field images, we improved our experimental apparatus to observe spots intensity of the diffraction patterns, and we realized the visualization of each crystalline plane area.