The 81st JSAP Autumn Meeting, 2020

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[9p-Z12-1~19] 15.5 Group IV crystals and alloys

Wed. Sep 9, 2020 1:00 PM - 6:00 PM Z12

Kentarou Sawano(Tokyo City Univ.), Kaoru Toko(Univ. of Tsukuba)

2:30 PM - 2:45 PM

[9p-Z12-7] Precursor Densification in Solid-Phase Crystallization: Application to GaAs Thin Films

〇Masaya Saito1, Takeshi Nishida1, Takashi Suemasu1, Kaoru Toko1 (1.Univ. of Tsukuba)

Keywords:GaAs, thin film semiconductor, solid-phase crystallization