The 81st JSAP Autumn Meeting, 2020

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3 Optics and Photonics » 3.13 Semiconductor optical devices

[9p-Z13-1~14] 3.13 Semiconductor optical devices

Wed. Sep 9, 2020 12:30 PM - 4:30 PM Z13

Taro Arakawa(Yokohama Natl. Univ.), Tomoyuki Miyamoto(Tokyo Tech)

1:15 PM - 1:30 PM

[9p-Z13-3] Bayesian optimization of experimental conditions of hydrogen plasma treatment on TiOx

〇Shinsuke Miyagawa1, Kazuhiro Gotoh1, Kentaro Kutsukake2, Yasuyoshi Kurokawa1, Noritaka Usami1 (1.Graduate School of Eng., Nagoya Univ., 2.AIP, RIKEN)

Keywords:crystalline Si solar cell, passivation, hydrogen plasma treatment