[9p-Z18-1~21] 3.7 Laser processing

[9p-Z18-7] Dependence of laser pulse number on the formation of circularly-polarized LIPSS

〇Hidenori Matsuura¹, Reina Miyagawa¹, Eryu Osamu¹ (1.NITech)

Keywords:LIPSS, GaN, Circularly polarized light

A laser-induced periodic surface structure (LIPSS) is a nano-order periodic structure formed on a substrate surface by laser irradiation. Aiming to control device characteristics by LIPSS, we have attempted shape control of LIPSS that affects device characteristics. It is known that the shape of LIPSS changes depending on the polarization of laser, but there are few reports on circularly polarized light, and the process of structure formation has not been clarified. In this study, we investigated the LIPSS formation process by circularly polarized lasers with varying laser pulse stacking numbers.