[9p-Z18-1~21] 3.7 Laser processing

[9p-Z18-8] Dependence of laser pulse interval and pulse number s on LIPSS formation

〇Tetsuyuki Ohgai¹, Reina Miyagawa¹, Osamu Eryu¹ (1.NITech)

Keywords:LIPSS, GaAs, femtosecond laser

The laser-induced periodic structure (LIPSS) is a fine periodic structure formed on the material surface by irradiating an ultrashort pulse laser. It has been reported that LIPSS is formed by stacking laser pulses, and that the LIPSS cycle changes as the stacking number increases. In this study, we investigated the effects of laser pulse interval and pulse stacking number on LIPSS formation in order to understand the interaction between stacked laser pulses.