[9p-Z19-1~16] 3.15 Silicon photonics and integrated photonics

[9p-Z19-5] Study on High-Temperature Operation of Electro-Absorption Optical Modulator, Using Ge/Si Rib Waveguide

〇Junichi Fujikata¹, Masataka Noguchi¹, Seok-Hwan Jeong¹, Yosuke Onawa^1,2, Daisuke Shimura^1,2, Kazuki Kawashita³, Riku Katamawari³, Hideki Ono^1,2, Hideaki Okayama^1,2, Hiroyuki Takahashi^1,2, Hiroki Yaegashi^1,2, Yasuhiko Ishikawa³, Takahiro Nakamura¹ (1.PETRA, 2.OKI, 3.Toyohashi Univ.Tech.)

Keywords:germanium, electro-absorption optical modulator, Franz-Keldysh effect

In this study, we report on the operation wavelengths and high-speed characteristics at high-temperature for a Ge/Si electro-absorption optical modulator based on the rib waveguide structure and analysis results of Ge crystalline quality.