The 81st JSAP Autumn Meeting, 2020

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Oral presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

[9p-Z21-1~10] 8.3 Plasma nanotechnology

Wed. Sep 9, 2020 1:30 PM - 4:15 PM Z21

Hiroki Kondo(Nagoya University), Giichiro Uchida(Meijo Univ)

4:00 PM - 4:15 PM

△ [9p-Z21-10] Deposition of Ge thin film by He plasma sputtering and its application to Li-ion batteries

〇(M1)Kenta Nagai1, Yuma Habu1, Junki Hayashi1, Giichiro Uchida1,2 (1.Meijo Univ., 2.Ene Inst Meijo Univ.)

Keywords:Plasma, Li-ion batteries, Nano particles