[9p-Z21-1~10] 8.3 Plasma nanotechnology

[9p-Z21-3] Radical nitridation of silicon by wavelength-selectively excited gold nanoparticle plasmons

〇Takeshi Kitajima¹, Machiko Miyake¹, Shouma Kuwata¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:plasma, plasmon, gold nanoparticle

The catalytic effect of gold nanoparticle plasmons has been utilized in recent years. We have applied hot electrons supplied from gold nanoparticles to plasma surface reactions to reduce damage due to ion bombardment and to utilize them for the formation of ultra-thin films of high quality. Here, we focus on the wavelength dependence of plasmon excitation, and report that we have discovered the effect of green light excitation that allows selective radical nitriding.