[9p-Z25-1~6] 7.3 Micro/Nano patterning and fabrication

[9p-Z25-1] Basic Research on Stereophonic Projection Lithography Using Magic Mirror Optics

〇Toshiyuki Horiuchi¹, Kobayashi Hiroshi¹ (1.Tokyo Denki Univ.)

Keywords:photolithography, magic mirror, stereophonic lithography

A new projection exposure system was contrived for printing patterns on an arbitrarily but gently curved object by an only one lump exposure, and basic experiments for confirming the stereophonic image formation were carried out. It is known that clear stereophonic images are easily formed using magic mirror optics composed of faced parabolic mirrors. In the magic mirror, when an object placed on the bottom of the base mirror is illuminated by the daylight from the top aperture of the upper mirror, an image of the object is formed in the top aperture of the upper mirror. In this research, an aperture was added at the bottom of the base mirror, and an object placed in the aperture was illuminated obliquely upward by a light source placed at a position lower than the base mirror. As a result, it was demonstrated that similar stereophonic images were formed in the top aperture of the upper mirror. Patterns on the original object will be replicated on the same shape surface.