4:00 PM - 6:00 PM
△ [14p-PB10-3] Effect of nitrogen doping on intrinsic point defect behavior in growing CZ-Si crystal
〇(M1)Motoharu Taniguchi1, Koji Sueoka2, Masataka Hourai3 (1.Master of Okyayama Pref. Univ., 2.Okayama Pref. Univ., 3.SUMCO CORPORATION)