Nobuo Sasaki

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:15 PM - 2:30 PM

[15p-A305-3] Growth of Si Thin Films on Polyimide Substrates by the (100) CW-Laser Crystallization

〇Nobuo Sasaki^1,2,3, Muhammad Arif², Yukiharu Uraoka², Jun Gotoh³, Shigeto Sugimoto³ (1.Sasaki Consulting, 2.NAIST, 3.V-technology)