Akito Hara

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 4:15 PM

[15p-A305-8] Performance of 4T Cu-MIC poly-Ge_1-xSn_x TFTs and their application to inverters

Ryo Miyazaki¹, 〇Akito Hara¹ (1.Tohoku Gakuin Univ.)