Tatsuhiko Nishimura

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:00 AM - 11:30 AM A201 (6-201)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15a-A201-1~8] 15.6 Group IV Compound Semiconductors (SiC)

10:45 AM - 11:00 AM

[15a-A201-6] Characterization of 4H-SiC wafer using a Laser Terahertz Emission Microscope at 400 nm

〇Tatsuhiko Nishimura¹, Hidetoshi Nakanishi¹, Iwao Kawayama^2,3, Masayoshi Tonouchi², Takuji Hosoi⁴, Takayoshi Shimura⁴, Heiji Watanabe⁴ (1.SCREEN, 2.ILE, Osaka Univ., 3.Kyoto Univ., 4.Graduate School of Eng., Osaka Univ.)

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