Ayaka Abe

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 1:15 PM - 5:30 PM A409 (6-409)

Oral presentation
| 12 Organic Molecules and Bioelectronics
| 12.4 Organic light-emitting devices and organic transistors

[13p-A409-1~14] 12.4 Organic light-emitting devices and organic transistors

4:15 PM - 4:30 PM

[13p-A409-11] WVTR of Al₂O₃ film deposited at room temperature using Pure-Ozone-ALD process with TMA

〇Ayaka Abe¹, Takayuki Hagiwara¹, Naoto Kameda¹, Toshinori Miura¹, Yoshiki Morikawa¹, Mitsuru Kekura¹, Ken Nakamura², Hidehiko Nonaka² (1.MEIDENSHA CORPORATION, 2.AIST)