FUMIMASA HORIKIRI

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 5:30 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[12p-B401-1~16] 13.7 Compound and power electron devices and process technology

2:30 PM - 2:45 PM

[12p-B401-6] Thermal assisted contactless photoelectrochemical (PEC) etching for GaN

〇FUMIMASA HORIKIRI¹, Noboru Fukuhara¹, Hiroshi Ohta², Naomi Asai², Yoshinobu Narita¹, Takehiro Yoshida¹, Tomoyoshi Mishima², Masachika Toguchi³, Kazuki Miwa³, Hiroki Ogami³, Taketomo Sato³ (1.SCIOCS, 2.Hosei Univ., 3.Hokkaido Univ.)

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