Masachika Toguchi

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 5:30 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[12p-B401-1~16] 13.7 Compound and power electron devices and process technology

2:15 PM - 2:30 PM

[12p-B401-5] Fabrication of recessed-gate AlGaN/GaN HEMTs utilizing contactless photoelectrochemical (CL-PEC) etching

〇(D)Masachika Toguchi¹, Kazuki Miwa¹, Fumimasa Horikiri², Noboru Fukuhara², Yoshinobu Narita², Osamu Ichikawa², Ryota Isono², Takeshi Tanaka², Taketomo Sato¹ (1.RCIQE, Hokkaido Univ., 2.SCIOCS Co. Ltd.)

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