Sho Amano

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:45 PM D215 (11-215)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

2:00 PM - 2:15 PM

[15p-D215-2] Soft X-ray Lithography using Laser Plasma Emission at 3 nm

〇Sho Amano¹ (1.Univ.of Hyogo, LASTI)