Pongsakorn Sihapitak

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| Joint Session M "Phonon Engineering"
| 22.1 Joint Session M "Phonon Engineering"

[13a-PB3-1~9] 22.1 Joint Session M "Phonon Engineering"

9:30 AM - 11:30 AM

▲ [13a-PB3-8] Effects of phase shift mask design on three-dimension nanostructure fabrication

〇(M2C)Pongsakorn Sihapitak¹, Yasuaki Ishikawa¹, Xudongfang Wang¹, Mutsunori Uenuma¹, Yukiharu Uraoka¹ (1.NAIST)